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Type: Journal article
Title: Nanostructured molybdenum nitride-based coatings: effect of nitrogen concentration on microstructure and mechanical properties
Author: Wang, J.
Munroe, P.
Zhou, Z.
Xie, Z.
Citation: Thin Solid Films, 2019; 682:82-92
Publisher: Elsevier
Issue Date: 2019
ISSN: 0040-6090
Statement of
Jian Wang, Paul Munroe, Zhifeng Zhou, Zonghan Xie
Abstract: Molybdenum nitride (MoNₓ) coatings were deposited onto AISI M2 tool steel substrates (hardened to HRC 60) by magnetron sputtering. The nitrogen content was controlled by means of a closed-loop optical emission monitor. The coating microstructure was examined by X-ray photoelectron spectroscopy, X-ray diffraction, scanning electron microscopy and transmission electron microscopy. This showed that the increased nitrogen content led to a transformation from body-centered cubic α-Mo phase to γ-Mo₂N phase (NaCl-B1 type) and then to a face-centered cubic MoN phase. The mechanical and tribological properties of these coatings were evaluated by nano-indentation, wear and scratch testing. The γ-Mo₂N coating showed the highest hardness and the highest values of H (hardness)/E* (effective elastic modulus) and H³/E* ratio. During scratch and wear tests, the γ-Mo₂N coating exhibited the best resistance to deformation and the lowest wear rate.
Keywords: Molybdenum nitride coatings; magnetron sputtering; optical emission monitoring; wear tests; scratch tests
Rights: © 2019 Published by Elsevier B.V.
DOI: 10.1016/j.tsf.2019.05.011
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Mechanical Engineering publications

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