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Type: Journal article
Title: Scratch and wear resistance of hydrophobic CeO₂-ₓ coatings synthesized by reactive magnetron sputtering
Other Titles: Scratch and wear resistance of hydrophobic CeO(2)-(x) coatings synthesized by reactive magnetron sputtering
Author: Kabir, M.S.
Zhou, Z.
Xie, Z.
Munroe, P.
Citation: Ceramics International, 2020; 46(1):89-97
Publisher: Elsevier
Issue Date: 2020
ISSN: 0272-8842
Statement of
Mohammad Sharear Kabir, Zhifeng Zhou, Zonghan Xie, Paul Munroe
Abstract: CeO₂-ₓ coatings were deposited under variable oxygen flow ratios (%f₀₂) onto Si substrates by reactive magnetron sputtering. Nanoindentation testing revealed an increase in the hardness, elastic modulus, H/E and H³/E² ratio with increasing oxygen flow ratio, which in turn increased the adhesion and tribological performance of the coatings. Scratch testing yielded the highest critical load (Lc₂ = 28.8 N) and CPRs = 103 for the coating deposited with the highest oxygen flow ratio (57 %f₀₂). Cracking events during scratch testing were initiated by tensile forces behind the scratch stylus, which led to the formation of semi-circular ring cracks. As the normal load increased, transverse cracks emerged extending outwards from the scratch track towards the edge causing the exposure of substrate. Beyond Lc₂, severe spallation of the CeO₂-ₓ coatings led to coating failure. Furthermore, the specific wear rates of the CeO2-x coatings were determined to be within the ~10⁻¹⁵ m³/Nm range influenced by three-body abrasive wear. In-depth analyses from scratch and wear data indicates that these coatings possess good adhesion and durability.
Keywords: Reactive magnetron sputtering; cerium oxide coating; scratch toughness; tribological performance; durability
Rights: © 2019 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
DOI: 10.1016/j.ceramint.2019.08.237
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