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Type: Journal article
Title: Double modulated differential THz-TDS for thin film dielectric characterization
Author: Mickan, S.
Lee, K.S.
Lu, T.M.
Munch, J.
Abbott, D.
Zhang, X.
Citation: Microelectronics Journal, 2002; 33(12):1033-1042
Publisher: Elsevier Sci Ltd
Issue Date: 2002
ISSN: 0026-2692
Statement of
Samuel P. Mickan, Kwang-Su Lee, Toh-Ming Lu, Jesper Munch, Derek Abbott and X. -C. Zhang
Abstract: Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz radiation to characterize the optical properties of thin dielectric films. Characterizing thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonic systems and micro-electro-mechanical systems. There are potential applications for gene and protein chips. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. An iterative algorithm is presented to estimate the optical properties of a given thin film. The technique is experimentally verified using 1-μm-thick samples of silicon dioxide on silicon.
Keywords: Terahertz
Thin films
DOI: 10.1016/S0026-2692(02)00108-8
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Appears in Collections:Aurora harvest 2
Environment Institute publications
Physics publications

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