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|Title:||A review on the statics and dynamics of electrically actuated nano and micro structures|
|Citation:||International Journal of Non-Linear Mechanics, 2021; 129:103658-1-103658-33|
|Hossein B. Khaniki, Mergen H. Ghayesh, Marco Amabili|
|Abstract:||Nano and micro electro-mechanical systems (NEMS and MEMS) have been attracting a large amount of attention recently as they have extensive current/potential applications. However, due to their scale, molecular interaction and size effects are considerably high which needs to be considered in the theoretical modelling of their electro-mechanical behaviour. Both nano- and micro-scale electrically actuated structures are discussed when subjected to constant and time-varying voltages, and different theories and models, introduced in the past few years for modelling such small structures, are discussed. It is highlighted that considering the intermolecular forces and size-dependence effects can change both the static and dynamic behaviours of such systems significantly. This review presents the current stage of the research on electrically actuated NEMS/MEMS by analysing the latest models and studies in this field in the framework of electro-mechanical coupling and small-size effects.|
|Keywords:||NEMS; MEMS; Nanobeam; Nanoplate; Nanoshell; Microbeam; Microplate; Microshell; Electrically actuated; Electrostatic; Electrodynamic|
|Description:||Available online 3 December 2020|
|Rights:||© 2020 Elsevier Ltd. All rights reserved.|
|Appears in Collections:||Aurora harvest 8|
Mechanical Engineering publications
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