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https://hdl.handle.net/2440/39754
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Type: | Conference paper |
Title: | Low loss silicon window material for submillimeter waves using micromachined artificial dielectrics for anti-reflection coating |
Author: | Biber, S. Schneiderbanger, D. Schmidt, L. Walther, M. Fischer, B. Schwarzer, M. Jepsen, P. |
Citation: | IRMMW 2004/THz 2004: Conference digest of the Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics, University of Karlsruhe, Karlsruhe, Germany, September 27 - October 1, 2004 / pp. 105-106. |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers |
Publisher Place: | Online |
Issue Date: | 2004 |
ISBN: | 0780384903 |
Conference Name: | International Conference on Infrared and Millimeter Waves (29th : 2004 : Karlsruhe, Germany) |
Statement of Responsibility: | Biber, S. ; Schneiderbanger, D. ; Schmidt, L.-P. ; Walther, M. ; Fischer, B. ; Schwarzer, M. ; Jepsen, P.U. |
Abstract: | A high-resistivity silicon wafer was used to design a broad-band low loss window material for 600 GHz by micromachining an artificial dielectric as a quarter wave transformer on the front and rear side of the wafer. The artificial dielectric is made from a 2-dimensional periodic structure to ensure the same transmission characteristics for horizontally and vertically polarized waves. |
Rights: | © Copyright 2004 IEEE |
DOI: | 10.1109/ICIMW.2004.1421975 |
Published version: | http://dx.doi.org/10.1109/icimw.2004.1421975 |
Appears in Collections: | Aurora harvest Electrical and Electronic Engineering publications |
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