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Type: Conference paper
Title: Characterization of the complex permittivity of thin films using a slow-wave coplanar strips resonator
Author: Karami Horestani, A.
Fumeaux, C.
Al-Sarawi, S.
Abbott, D.
Citation: Proceedings of the 37th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2012.
Publisher: IEEE
Publisher Place: USA
Issue Date: 2012
Series/Report no.: International Conference on Infrared Millimeter and Terahertz Waves
ISBN: 9781467315975
ISSN: 2162-2027
Conference Name: International Conference on Infrared, Millimeter and Terahertz Waves (37th : 2012 : Wollongong, Australia)
Statement of
Ali K. Horestani, Christophe Fumeaux, Said Al-Sarawi and Derek Abbott
Abstract: This paper proposes a characterization method for the electromagnetic properties of thin films, based on the resonance properties of a slow-wave coplanar strips resonator. It is shown that using the resonant frequency and the quality factor of the resonator, permittivity and loss tangent of an unknown thin film at high frequencies such as mm-wave frequencies can be accurately determined. The method is validated by characterizing a silicon dioxide layer in an standard CMOS process as the thin film under test.
Description: Extent: 2p.
Rights: ©2012 IEEE
RMID: 0020124207
DOI: 10.1109/IRMMW-THz.2012.6379510
Appears in Collections:Electrical and Electronic Engineering publications

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