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Type: Book chapter
Title: Focused Ion Beam (FIB) technology for micro-and nanoscale fabrications
Author: Kant, K.
Losic, D.
Citation: Lecture notes in nanoscale science and technology, 2013 / Zhiming AWaag, M., Salamo, G., Kishimoto, N., Bellucci, S., Park, Y. (ed./s), pp.1-22
Publisher: Springer
Publisher Place: Switzerland
Issue Date: 2013
ISBN: 9783319028736
Statement of
Krishna Kant and Dusan Losic
Keywords: Focused ion beam; Micro- and nanofabrications; Ion milling; Deposition; Nanopore array
Rights: © Springer International Publishing Switzerland 2013
RMID: 0020138899
DOI: 10.1007/978-3-319-02874-3_1
Appears in Collections:Chemical Engineering publications

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