A three-DOF compliant micromotion stage with flexure hinges
Date
2004
Authors
Lu, T.
Handley, D.
Yong, Y.
Eales, C.
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Advisors
Journal Title
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Journal article
Citation
Industrial Robot, 2004; 31(4):355-361
Statement of Responsibility
Tien-Fu Lu, Daniel C. Handley, Yuen Kuan Yong, Craig Eales
Conference Name
Abstract
Micromanipulation has enabled numerous technological breakthroughs in recent years, from advances in biotechnology to microcomponent assembly. Micromotion devices commonly use piezoelectric actuators (PZT) together with compliant mechanisms to provide fine motions with position resolution in the nanometre or even sub-nanometre range. Many multiple degree of freedom (DOF) micromotion stages have parallel structures due to better stiffness and accuracy than serial structures. This paper presents the development of a three-DOF compliant micromotion stage with flexure hinges and parallel structure for applications requiring motions in micrometres. The derivation of a simple linear kinematic model of the compliant mechanism is presented and simulation results before and after calibration are compared with results from finite element (FE) modeling and experiments. The position control system, which uses an experimentally determined constant-Jacobian, and its performance are also presented and discussed.
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Dissertation Note
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