Thin film characterization using terahertz differential time-domain spectroscopy and double modulation

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dc.contributor.authorMickan, S.
dc.contributor.authorLee, K.S.
dc.contributor.authorLu, T.M.
dc.contributor.authorBarnat, E.
dc.contributor.authorMunch, J.
dc.contributor.authorAbbott, D.
dc.contributor.authorZhang, X.
dc.contributor.conferenceElectronics and Structures for MEMS II (2nd : 2001 : Adelaide, Australia)
dc.contributor.editorBergmann, N.W.
dc.date.issued2001
dc.description.abstractCharacterizing the optical and dielectric properties of thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonics systems and micro-opto-electro-mechanical systems (MOEMS). Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz (THz) radiation to detect phase changes of less than 0.6 femtoseconds (fs) and absorption changes corresponding to several molecular monolayers. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. The technique is experimentally verified using 1 µm thick samples of silicon dioxide on silicon.
dc.description.statementofresponsibilitySamuel P. Mickan, Kwang-Su Lee, Toh-Ming Lu, Edward Barnat, Jesper Munch, Derek Abbott, and Xi-Cheng Zhang
dc.identifier.citationElectronics and Structures for MEMS II, 17-19 December 2001 / Neil W. Bergmann, Derek Abbott, Alex Hariz, Vijay K. Varadan (eds.): pp. 197-209
dc.identifier.doi10.1117/12.449149
dc.identifier.isbn0819443212
dc.identifier.issn0277-786X
dc.identifier.issn1996-756X
dc.identifier.orcidAbbott, D. [0000-0002-0945-2674]
dc.identifier.urihttp://hdl.handle.net/2440/28357
dc.language.isoen
dc.publisherTHE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.publisher.placePO BOX 10 BELLINGHAM WASHINGTON USA
dc.relation.ispartofseriesProceedings of SPIE--the International Society for Optical Engineering ; 4591
dc.rights© 2003 COPYRIGHT SPIE--The International Society for Optical Engineering
dc.source.urihttps://doi.org/10.1117/12.449149
dc.titleThin film characterization using terahertz differential time-domain spectroscopy and double modulation
dc.typeConference paper
pubs.publication-statusPublished

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