Optical gratings coated with thin SI3N4 layer for efficient immunosensing by optical waveguide lightmode spectroscopy
Date
2012
Authors
DiƩguez, L.
Caballero, D.
Calderer, J.
Moreno, M.
Martinez, E.
Samitier, J.
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Journal article
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Biosensors, 2012; 2(2):114-126
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Abstract
New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si3N4 as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.
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Copyright 2012 This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0). (https://creativecommons.org/licenses/by-nc-sa/3.0/)