Modelling of coplanar waveguide transmission lines in multiple metal layer processes

Date

2007

Authors

Heading, E.
Hansen, H.
Parker, M.

Editors

Al-Sarawi, S.

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Conference paper

Citation

Proceedings of Smart Materials Nano- and Micro-Smart Systems, 2007;. pp.1-7

Statement of Responsibility

E. Heading, H. J. Hansen and M. E. Parker

Conference Name

Smart structures, devices, and systems III (2006 : Adelaide, Australia)

Abstract

Accurate characterisation of transmission lines is essential in enabling the design of Monolithic Microwave Integrated Circuits (MMICs) or Radio Frequency Integrated Circuits (RFICs). One RFIC technology currently being pursued is Silicon on Sapphire Complementary Metal Oxide Semiconductor (CMOS) technology. CMOS processes typically involve stacked metal layer structures and the correct method of modelling coplanar waveguides in CMOS is unclear. This paper reports on preliminary studies into electromagnetic design, with an emphasis on correctly predicting losses associated with these structures.

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Dissertation Note

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Published online Jan. 11, 2007.

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Copyright © 2007 SPIE - The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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