The microstructure and mechanical properties of tantalum nitride coatings deposited by a plasma assisted bias sputtering deposition process
Date
2016
Authors
Xu, S.
Munroe, P.
Xu, J.
Xie, Z.
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Journal article
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Surface and Coatings Technology, 2016; 307:470-475
Statement of Responsibility
Song Xu, Paul Munroe, Jiang Xu, Zong-Han Xie
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Abstract not available
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© 2016 Elsevier B.V. All rights reserved.