SiC-FET methanol sensors for process control and leakage detection
Date
2013
Authors
Darmastuti, Z.
Bhattacharyya, P.
Andersson, M.
Kanungo, J.
Basu, S.
Käll, P.O.
Ojamäe, L.
Spetz, A.L.
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Journal Title
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Type:
Journal article
Citation
Sensors and Actuators, B: Chemical, 2013; 187:553-562
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Abstract
Two types of SiC based field effect transistor sensors, with Pt or Ir gate, were tested to detect methanolin the concentration range of 0–1600 ppm for both process control and leak detection applications. Themethanol response was investigated both with and without oxygen, since the process control might beconsidered as oxygen free application, while the sensor is operated in air during leak detection. Pt sensorsoffered very fast response with appreciably high response magnitude at 200◦C, while Ir sensors showedboth higher response and response time up to 300◦C, but this decreased considerably at 350◦C. Crosssensitivity effect in presence of oxygen, hydrogen, propene and water vapor was also investigated. Thepresence of oxygen improved the response of both sensors, which is favorable for the leak detectionapplication. Hydrogen had a large influence on the methanol response of both sensors, propene had anegligible influence, while water vapor changed direction of the methanol response for the Pt sensor.The detection mechanism and different sensing behavior of Pt and Ir gate sensors were discussed in thelight of model reaction mechanisms derived from hybrid density-functional theory quantum-chemicalcalculations.
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Link to a related website: http://liu.diva-portal.org/smash/get/diva2:572085/FULLTEXT01, Open Access via Unpaywall
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Copyright 2013 Elsevier B.V.