Minase, J.Lu, T.Cazzolato, B.Grainger, S.2011-04-192011-04-192010Proceedings of the 2010 Australasian Conference on Robotics & Automation (ACRA2010), held in Brisbane Australia, 1-3 December 2010 / G. Wyeth and B. Upcroft (eds.): pp.1-109780980740417http://hdl.handle.net/2440/63346The inverse control of a piezoelectric actuator for precise tracking operation of a three degree of freedom (DOF) micro-motion stage is presented in this paper. This stage, which provides translational motion in X and Y directions and rotation about the Z-axis, is actuated using three stack type piezoelectric actuators. Although capable of resolution in micrometres to sub-nanometres, the actuators exhibit a significant amount of hysteresis and creep, which may lead to substantial errors if the stage was used in a tracking application. Thus, for the stage to provide precise operation, it is necessary to mitigate the effects due to hysteresis and creep. To minimize these effects, an inverse, feed-forward, control strategy is presented in this paper. Experimental results are presented to display the effectiveness of this control strategy in precise operation of the stage over a wide band of amplitudes and frequencies.enCopyright status unknownConference paper00201026022-s2.0-8485561295432468Lu, T. [0000-0001-9757-9028]Cazzolato, B. [0000-0003-2308-799X]Grainger, S. [0000-0003-4664-7320]