Diéguez, L.Caballero, D.Calderer, J.Moreno, M.Martinez, E.Samitier, J.2025-12-172025-12-172012Biosensors, 2012; 2(2):114-1262079-63742079-6374https://hdl.handle.net/1959.8/152101New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si3N4 as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.enCopyright 2012 This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0). (https://creativecommons.org/licenses/by-nc-sa/3.0/)biosensoroptical gratingssilicon nitridewaveguideJournal article10.3390/bios20201142-s2.0-84879191626