Ponnusamy Meenakshisundaram, Thirunavukkarasu.2025-12-172025-12-172006https://hdl.handle.net/1959.8/82761The understanding of mechanical properties of thin films at the nano/sub micron level is important for rational selection of coatings for critical applications. In this thesis, the nanomechanical properties of plasma polymerised thin films were investigated in detail. The principal aim of the present work is to gain a fundamental understanding of the nanomechanical properties of plasma polymerised siloxane thin films, and the influence of the substrate on those properties.enPlasma engineeringPolymersSurface chemistrythesis