The microstructure and mechanical properties of tantalum nitride coatings deposited by a plasma assisted bias sputtering deposition process

Xu, S.Munroe, P.Xu, J.Xie, Z.2017-03-302017-03-302016Surface and Coatings Technology, 2016; 307:470-4750257-8972http://hdl.handle.net/2440/104070Abstract not availableen© 2016 Elsevier B.V. All rights reserved.Tantalum nitride coating; microstructure; mechanical property; nanoporosity; toughnessThe microstructure and mechanical properties of tantalum nitride coatings deposited by a plasma assisted bias sputtering deposition processJournal article003005637710.1016/j.surfcoat.2016.09.0150003906222000562-s2.0-84988372485273990