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https://hdl.handle.net/2440/101770
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Type: | Journal article |
Title: | Tuning the phase transition of ZnO thin films through lithography: an integrated bottom-up and top-down processing |
Author: | Malfatti, L. Pinna, A. Enzo, S. Falcaro, P. Marmiroli, B. Innocenzi, P. |
Citation: | Journal of Synchrotron Radiation, 2015; 22(1):165-171 |
Publisher: | Wiley-Blackwell |
Issue Date: | 2015 |
ISSN: | 0909-0495 1600-5775 |
Statement of Responsibility: | Luca Malfatti, Alessandra Pinna, Stefano Enzo, Paolo Falcaro, Benedetta Marmiroli and Plinio Innocenzi |
Abstract: | An innovative approach towards the physico-chemical tailoring of zinc oxide thin films is reported. The films have been deposited by liquid phase using the sol-gel method and then exposed to hard X-rays, provided by a synchrotron storage ring, for lithography. The use of surfactant and chelating agents in the sol allows easy-to-pattern films made by an organic-inorganic matrix to be deposited. The exposure to hard X-rays strongly affects the nucleation and growth of crystalline ZnO, triggering the formation of two intermediate phases before obtaining a wurtzite-like structure. At the same time, X-ray lithography allows for a fast patterning of the coatings enabling microfabrication for sensing and arrays technology. |
Keywords: | bottom-up/top-down lithography sol-gel thin film zinc oxide |
Rights: | © 2015 International Union of Crystallography |
DOI: | 10.1107/S1600577514024047 |
Grant ID: | http://purl.org/au-research/grants/arc/DE120102451 |
Published version: | http://dx.doi.org/10.1107/s1600577514024047 |
Appears in Collections: | Aurora harvest 3 Physics publications |
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