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https://hdl.handle.net/2440/112757
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Type: | Book chapter |
Title: | Dopant metrology in advanced FinFETs |
Author: | Lansbergen, G. Rahman, R. Tettamanzi, G. Verduijn, J. Hollenberg, L. Klimeck, G. Rogge, S. |
Citation: | CMOS Nanoelectronics: Innovative Devices, Architectures and Applications, 2013 / Collaert, N. (ed./s), Ch.11, pp.399-412 |
Publisher: | Pan Stanford Publishing |
Publisher Place: | Singapore |
Issue Date: | 2013 |
ISBN: | 9814364029 9789814364027 |
Editor: | Collaert, N. |
Statement of Responsibility: | G. P. Lansbergen, R. Rahman, G.C. Tettamanzi, J. Verduijn, L. C. L. Hollenberg, G. Klimeck, and S. Rogge |
Abstract: | Ultra-scaled FinFET transistors bear unique fingerprint-like device- to-device differences attributed to random single impurities. This chapter describes how, through correlation of experimental data with multimillion atom tight-binding simulations using the NEMO 3-D code, it is possible to identify the impurity’s chemical species and determine their concentration, local electric field and depth below the Si/SiO2 interface. The ability to model the excited states rather than just the ground state is the critical component of the analysis and allows the demonstration of a new approach to atomistic impurity metrology. |
Keywords: | cond-mat.mes-hall |
Rights: | © 2013 Pan Stanford Publishing Pte. Ltd. |
DOI: | 10.1201/b13063-16 |
Published version: | https://www.taylorfrancis.com/books/e/9789814364034 |
Appears in Collections: | Aurora harvest 3 Physics publications |
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