Please use this identifier to cite or link to this item: http://hdl.handle.net/2440/63346
Type: Conference paper
Title: Inverse control of a piezoelectric actuator for precise operation of a micro-motion stage
Author: Minase, J.
Lu, T.
Cazzolato, B.
Grainger, S.
Citation: Proceedings of the 2010 Australasian Conference on Robotics & Automation (ACRA2010), held in Brisbane Australia, 1-3 December 2010 / G. Wyeth and B. Upcroft (eds.): pp.1-10
Publisher: ARAA
Publisher Place: www
Issue Date: 2010
ISBN: 9780980740417
Conference Name: ACRA 2010
Statement of
Responsibility: 
Jayesh Minase, Tien-Fu Lu, Ben Cazzolato and Steven Grainger
Abstract: The inverse control of a piezoelectric actuator for precise tracking operation of a three degree of freedom (DOF) micro-motion stage is presented in this paper. This stage, which provides translational motion in X and Y directions and rotation about the Z-axis, is actuated using three stack type piezoelectric actuators. Although capable of resolution in micrometres to sub-nanometres, the actuators exhibit a significant amount of hysteresis and creep, which may lead to substantial errors if the stage was used in a tracking application. Thus, for the stage to provide precise operation, it is necessary to mitigate the effects due to hysteresis and creep. To minimize these effects, an inverse, feed-forward, control strategy is presented in this paper. Experimental results are presented to display the effectiveness of this control strategy in precise operation of the stage over a wide band of amplitudes and frequencies.
Rights: Copyright status unknown
RMID: 0020102602
Published version: http://www.araa.asn.au/acra/acra2010/authors.html
Appears in Collections:Mechanical Engineering publications
Environment Institute publications

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