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|Title:||Inverse control of a piezoelectric actuator for precise operation of a micro-motion stage|
|Citation:||Proceedings of the 2010 Australasian Conference on Robotics & Automation (ACRA2010), held in Brisbane Australia, 1-3 December 2010 / G. Wyeth and B. Upcroft (eds.): pp.1-10|
|Conference Name:||ACRA 2010|
|Jayesh Minase, Tien-Fu Lu, Ben Cazzolato and Steven Grainger|
|Abstract:||The inverse control of a piezoelectric actuator for precise tracking operation of a three degree of freedom (DOF) micro-motion stage is presented in this paper. This stage, which provides translational motion in X and Y directions and rotation about the Z-axis, is actuated using three stack type piezoelectric actuators. Although capable of resolution in micrometres to sub-nanometres, the actuators exhibit a significant amount of hysteresis and creep, which may lead to substantial errors if the stage was used in a tracking application. Thus, for the stage to provide precise operation, it is necessary to mitigate the effects due to hysteresis and creep. To minimize these effects, an inverse, feed-forward, control strategy is presented in this paper. Experimental results are presented to display the effectiveness of this control strategy in precise operation of the stage over a wide band of amplitudes and frequencies.|
|Rights:||Copyright status unknown|
|Appears in Collections:||Mechanical Engineering publications|
Environment Institute publications
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