Please use this identifier to cite or link to this item:
https://hdl.handle.net/2440/63346
Type: | Conference paper |
Title: | Inverse control of a piezoelectric actuator for precise operation of a micro-motion stage |
Author: | Minase, J. Lu, T. Cazzolato, B. Grainger, S. |
Citation: | Proceedings of the 2010 Australasian Conference on Robotics & Automation (ACRA2010), held in Brisbane Australia, 1-3 December 2010 / G. Wyeth and B. Upcroft (eds.): pp.1-10 |
Publisher: | ARAA |
Publisher Place: | www |
Issue Date: | 2010 |
ISBN: | 9780980740417 |
Conference Name: | ACRA 2010 |
Statement of Responsibility: | Jayesh Minase, Tien-Fu Lu, Ben Cazzolato and Steven Grainger |
Abstract: | The inverse control of a piezoelectric actuator for precise tracking operation of a three degree of freedom (DOF) micro-motion stage is presented in this paper. This stage, which provides translational motion in X and Y directions and rotation about the Z-axis, is actuated using three stack type piezoelectric actuators. Although capable of resolution in micrometres to sub-nanometres, the actuators exhibit a significant amount of hysteresis and creep, which may lead to substantial errors if the stage was used in a tracking application. Thus, for the stage to provide precise operation, it is necessary to mitigate the effects due to hysteresis and creep. To minimize these effects, an inverse, feed-forward, control strategy is presented in this paper. Experimental results are presented to display the effectiveness of this control strategy in precise operation of the stage over a wide band of amplitudes and frequencies. |
Rights: | Copyright status unknown |
Published version: | http://www.araa.asn.au/acra/acra2010/authors.html |
Appears in Collections: | Aurora harvest Environment Institute publications Mechanical Engineering publications |
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