Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering
Date
2017
Authors
Cao, F.
Munroe, P.
Zhou, Z.
Xie, Z.
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Journal article
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Thin Solid Films, 2017; 639:137-144
Statement of Responsibility
Fuyang Cao, Paul Munroe, Zhifeng Zhou, Zonghan Xie
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Abstract not available
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© 2017 Elsevier B.V. All rights reserved.