Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering

Date

2017

Authors

Cao, F.
Munroe, P.
Zhou, Z.
Xie, Z.

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Journal article

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Thin Solid Films, 2017; 639:137-144

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Fuyang Cao, Paul Munroe, Zhifeng Zhou, Zonghan Xie

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Abstract not available

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© 2017 Elsevier B.V. All rights reserved.

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