Limiting factor for a piezoelectric tube scanner
| dc.contributor.author | Rana, M.S. | |
| dc.contributor.author | Pota, H. | |
| dc.contributor.author | Petersen, I.R. | |
| dc.contributor.author | Habibullah, H. | |
| dc.contributor.conference | American Control Conference, ACC 2016 (6 Jul 2016 - 8 Jul 2016 : Boston, United States) | |
| dc.date.issued | 2016 | |
| dc.description.abstract | In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. However, PTS suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; and (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs). This paper presents a survey of the literature on the PTS, an overview of a few emerging innovative solutions for its nanopositioning and future research directions. | |
| dc.identifier.citation | Proceedings of the ... American Control Conference. American Control Conference, 2016, vol.2016-July, iss.7526841, pp.7402-7407 | |
| dc.identifier.doi | 10.1109/ACC.2016.7526841 | |
| dc.identifier.isbn | 9781467386821 | |
| dc.identifier.issn | 0743-1619 | |
| dc.identifier.issn | 2378-5861 | |
| dc.identifier.uri | https://hdl.handle.net/11541.2/143272 | |
| dc.language.iso | en | |
| dc.publisher | 2016 American Automatic Control Council (AACC) | |
| dc.publisher.place | US | |
| dc.relation.funding | ARC DP160101121 | |
| dc.relation.ispartofseries | Proceedings of the American Control Conference | |
| dc.rights | Copyright 2016 American Automatic Control Council (AACC). | |
| dc.source.uri | http://dx.doi.org/10.1109/ACC.2016.7526841 | |
| dc.subject | atomic force microscopes (AFMs) | |
| dc.subject | piezoelectric tube scanners (PTSs) | |
| dc.subject | nanotechnology applications | |
| dc.title | Limiting factor for a piezoelectric tube scanner | |
| dc.type | Conference paper | |
| pubs.publication-status | Published | |
| ror.mmsid | 9916418581201831 |