Perfluoro(methylcyclohexane) plasma polymer thin film

Date

2005

Authors

Dutta, N.K.
Tran, N.D.
Choudhury, N.R.

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Journal of Polymer Science, Part B: Polymer Physics, 2005; 43(11):1392-1400

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<jats:title>Abstract</jats:title><jats:p>Scanning thermal microscopy (SThM) has been used for the visualization and characterization of an ultrathin plasma polymer film of perfluoro(methylcyclohexane) at a submicrometer level. The morphology, molecular dynamics, and lateral homogeneity of the ultrathin film have all been examined precisely with SThM. The growth of the plasma polymer film on a silicon wafer (Si‐wafer) has also been precisely determined using a new burning‐hole technique. © 2005 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 43: 1392–1400, 2005</jats:p>

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