Fabrication of Integrated Optical Fibre Tip for Micron CMMs Touch Trigger Probe Application
Files
(Published version)
Date
2005
Authors
Ji, H.
Hsu, H.Y.
Chua, J.
Kong, L.
Wedding, A.B.
She, F.M.
Lin, G.C.
Fan, K.C.
Editors
Harlz, A.J.
Advisors
Journal Title
Journal ISSN
Volume Title
Type:
Conference paper
Citation
Proceedings of SPIE, 2005 / Harlz, A.J. (ed./s), vol.6035
Statement of Responsibility
Conference Name
Conference on Microelectronics - Design, Technology and Packaging II (11 Dec 2005 - 14 Dec 2005 : Queensland University of Technology, Brisbane, Australia)
Abstract
In the last decade the general miniaturisation of complex products has lead to an increased importance of high precision machining and assembly. Together with increasing precision of products, the need for highly accurate dimensional inspection increases. CMMs (Coordinate Measuring Machines), a versatile and widespread dimensional metrology tool, can efficiently perform complex measurement with a resolution of the order of 0.1μm and a repeatability of 0.3μm. The existing probes for CMMs tend to be very bulky and result in high probing forces for geometrical measurements of high accuracy on small parts. In this paper, an economical and flexible method, which is developed for optical fibre fusing splicer system, is proposed to fabricate an integrated micro scale silicon probe with a spherical tip for micron CMMs. Based on the Taguchi method, an optimal combination of process parameters has been obtained to control the fabrication conditions that will ensure the manufacturing of tips of a high and consistent quality. With proper control of the process parameters, an optic fibre probe tip with the diameter dimension in the range of 200 to 400 μm is achieved and there is a great potential to fabricate a smaller tip with a diameter of 50-100μm in the future.