Design and construction of the motion mechanism of an XY micro-stage for precision positioning
Date
2013
Authors
Shimizu, Y.
Peng, Y.
Kaneko, J.
Azuma, T.
Ito, S.
Gao, W.
Lu, T.
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Journal article
Citation
Sensors and Actuators A: Physical, 2013; 201:395-406
Statement of Responsibility
Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao, Tien-Fu Lu
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Abstract
A motion mechanism of an XY micro-stage is designed and constructed for precision positioning of light weight objects. A driving unit, which consists of two PZTs and a friction component made by permanent magnet, is mounted on the center of the stage base for driving the stage moving plate made by steel in the X- and Y-directions based on a friction drive. The moving plate is attached on the friction component by the magnetic force. Leaf springs are employed to guide the X- and Y-directional motions of the moving plate over a range of ±1 mm in both directions. The stage motion mechanism, which dominates the overall size of XY micro-stage, has a compact size of 24 mm (X) × 24 mm (Y) × 5 mm (Z). The basic performances of the stage motion mechanism have been investigated by experiments. © 2013 Elsevier B.V. All rights reserved.
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© 2013 Elsevier B.V. All rights reserved.