Analysis on vibrations and infrared absorption of uncooled microbolometer

dc.contributor.authorChen, C.
dc.contributor.authorZhang, L.
dc.contributor.authorZhou, Y.
dc.contributor.authorZheng, X.
dc.contributor.authorDong, J.
dc.date.issued2015
dc.description.abstractThe characteristics of vibrations in microbolometer had significant impact on the performances of its infrared absorption. Due to the complex architectures, leading to the unfavorable connection between the analysis of infrared absorption and vibrations. To solve this issue, a finite element analysis (FEA) method was designed to make better compatible with infrared absorption and vibrations, as well as the resonant frequency analysis was completed. A vanadium oxide (VO2) based microbolometer was designed, and the corresponding three-dimensional (3D) modeling was also built. By vibrations and resonant frequency FEA, mechanics and frequency characteristic were studied. 200 G, 500 G and 1000 G acceleration vibrations were loaded on the 3D model at Z axis, which perpendicular to the bridge-like structure. It shows that under 500 G acceleration vibration, the deformation of the model was small enough to ensure the resonant cavity maintained λ/4 which means a high IR absorption for the microbolometer. The first order modal frequency, the second order modal frequency and the third order modal frequency of the 3D model were also analyzed. Purpose of resonant frequency analyzing of microbolometer was to avoid devices work on this frequency result of failure. Finally, an uncooled infrared focal plane was fabricated, and the experimental data matched the simulation fitting results. Perfect performance in mechanical properties, IR absorption and imaging effect of experimental device indicating a shorter design cycle and low cost potential. The fast, efficient FEA design method enables simulating infrared absorption and vibrations together
dc.identifier.citationJournal of Vibroengineering, 2015; 17(5):2733-2741
dc.identifier.issn1392-8716
dc.identifier.urihttps://hdl.handle.net/11541.2/116678
dc.language.isoen
dc.publisherPublic Institution Vibromechanika
dc.relation.fundingNational Science Foundation of China 61235006
dc.relation.fundingNational Science Foundation of China 61421002
dc.rightsCopyright 2015 JVE International Access Condition Notes: postprint will be available after 1 January 2017
dc.subjectmicrobolometer finite element analysis
dc.subjectvibration analysis
dc.subjectinfrared absorption
dc.titleAnalysis on vibrations and infrared absorption of uncooled microbolometer
dc.typeJournal article
pubs.publication-statusPublished
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