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Effect of improved tracking for atomic force microscope on piezo nonlinear behavior

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dc.contributor.authorRana, M.S.
dc.contributor.authorPota, H.R.
dc.contributor.authorPetersen, I.R.
dc.contributor.authorHabibullah, H.
dc.date.issued2014
dc.description.abstractNanotechnology is an area of modern science which deals with the control of matter at dimensions of 100 nm or less. In recent years, of all the available microscopy techniques, atomic force microscopy (AFM) has proven to be extremely versatile as an investigative tool in this field. However the performance of AFM is significantly limited by the effects of hysteresis, creep, cross-coupling, and vibration in its scanning unit, the piezoelectric tube scanner (PTS). This article presents the design and experimental implementation of a single-input single-output (SISO) model predictive control (MPC) scheme with a vibration compensator which is based on an identified model of the PTS. The proposed controller provides an AFM with the capability to achieve improved tracking and results in compensation of the nonlinear effects. The experimental results, which compare the tracking performances of the proposed controller for different reference signals, highlight the usefulness of the proposed control scheme.
dc.identifier.citationAsian Journal of Control, 2014; 17(3):747-761
dc.identifier.doi10.1002/asjc.924
dc.identifier.issn1561-8625
dc.identifier.issn1934-6093
dc.identifier.urihttps://hdl.handle.net/11541.2/143267
dc.language.isoen
dc.publisherWiley-Blackwell Publishing
dc.relation.fundingARC
dc.rightsCopyright 2014 Chinese Automatic Control Society and Wiley Publishing
dc.source.urihttp://dx.doi.org/10.1002/asjc.924
dc.subjectatomic force microscope
dc.subjectcreep
dc.subjectcross-coupling
dc.titleEffect of improved tracking for atomic force microscope on piezo nonlinear behavior
dc.typeJournal article
pubs.publication-statusPublished
ror.mmsid9916418581101831

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