Cylindrical and conical electrostatic wobble micromotors
Date
2001
Authors
Sarros, A.
Chew, E.
Crase, S.
Tay, B.
Soong, W.
Editors
Abbott, D.
Varadan, V.
Boehringer, K.
Varadan, V.
Boehringer, K.
Advisors
Journal Title
Journal ISSN
Volume Title
Type:
Conference paper
Citation
Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia / Derek Abbott, Vijay K. Varadan, Karl F. Boehringer (eds.) : pp. 294-305
Statement of Responsibility
Tony Sarros, Eng C. Chew, Simon Crase, Boon K. Tay, and Wen L. Soong
Conference Name
Smart Electronics and MEMS II (2000 : Melbourne, Australia)
Abstract
This paper describes the analysis, design, construction and testing of two electrostatic wobble micromotors; a conventional cylindrical design and a new conical design. Both designs have stators with eight segments. The cylindrical micromotor rotor is about 4mm in diameter and 20mm long while the conical rotor has a maximum diameter of about 10mm and is 12mm long. The advantage of the new conical design is that it eliminates the need for a pivot and hence substantially reduces the size of the motor. A detailed theoretical analysis of the designs is shown and compared with experimental results. The micromotors are operated under open-loop control and the rotation of the rotor was tested at an applied voltage of up to 500V.
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Dissertation Note
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©2003 COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.