The mechanism of low temperature deposition of crystalline anatase by reactive DC magnetron sputtering

dc.contributor.authorBarnes, M.C.
dc.contributor.authorKumar, S.
dc.contributor.authorGreen, L.K.
dc.contributor.authorHwang, N.M.
dc.contributor.authorGerson, A.R.
dc.date.issued2005
dc.identifier.citationSurface and Coatings Technology, 2005; 190(2-3):321-330
dc.identifier.doi10.1016/j.surfcoat.2004.04.003
dc.identifier.issn0257-8972
dc.identifier.urihttps://hdl.handle.net/1959.8/27188
dc.language.isoen
dc.publisherElsevier BV
dc.rightsCopyright status unknown
dc.source.urihttps://doi.org/10.1016/j.surfcoat.2004.04.003
dc.titleThe mechanism of low temperature deposition of crystalline anatase by reactive DC magnetron sputtering
dc.typeJournal article
pubs.publication-statusPublished
ror.mmsid9915912109501831

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