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On-channel integrated optofluidic pressure sensor with optically boosted sensitivity

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dc.contributor.authorGaber, N.
dc.contributor.authorAltayyeb, A.
dc.contributor.authorSoliman, S.A.
dc.contributor.authorSabry, Y.M.
dc.contributor.authorMarty, F.
dc.contributor.authorBourouina, T.
dc.date.issued2019
dc.description.abstractA novel optofluidic sensor that measures the local pressure of the fluid inside a microfluidic channel is presented. It can be integrated directly on-channel and requires no additional layers in fabrication. The detection can be accomplished at a single wavelength; and thereby, only a single laser diode and a single photodetector are required. This renders the sensor to be compact, cheap and easy to fabricate. Basically, the sensor consisted of a Fabry-Pérot microresonator enclosing the fluidic channel. A novel structure of the Fabry-Pérot was employed to achieve high-quality factor, that was essential to facilitate the single wavelength detection. The enhanced performance was attributed to the curved mirrors and cylindrical lenses used to avoid light diffraction loss. The presented sensor was fabricated and tested with deionized water liquid and shown to exhibit a sensitivity up to 12.46 dBm/bar, and a detection limit of 8.2 mbar. Numerical simulations are also presented to evaluate the mechanical-fluidic performance of the device.
dc.identifier.citationSensors, 2019; 19(4, article no. 944):1-10
dc.identifier.doi10.3390/s19040944
dc.identifier.issn1424-8220
dc.identifier.issn1424-8220
dc.identifier.urihttps://hdl.handle.net/11541.2/36371
dc.language.isoen
dc.publisherMDPI AG
dc.rightsCopyright 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution(CC BY) license. (http://creativecommons.org/licenses/by/4.0/)
dc.source.urihttps://doi.org/10.3390/s19040944
dc.subjectbragg mirrors
dc.subjectfabry-pérot cavity
dc.subjectintegrated microresonator
dc.subjectoptical pressure sensor
dc.titleOn-channel integrated optofluidic pressure sensor with optically boosted sensitivity
dc.typeJournal article
pubs.publication-statusPublished
ror.fileinfo12276474120001831 13276474110001831 Open Access Published Version
ror.mmsid9916800104801831

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