The chemistry of organophosphate thin film coatings from low pressure plasma and the effect of the substrate on adhesion

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2017

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Paulino, R.V.F.
Saboohi, S.
Michelmore, A.

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Journal article

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Plasma Processes and Polymers, 2017; 14(11):1-8

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Plasma polymers incorporating phosphate ions have been produced using triethyl phosphate as the precursor. Plasma phase analysis showed that the phosphate ion is highly stable in the plasma, while neutral species are more likely to be hydrocarbon precursor fragments. Increasing the RF power input increases the contribution of ions to the deposition. Surface analysis by XPS showed that the plasma polymer surfaces were a mixture of hydrocarbon species, retained P=O groups, with only minor loss of P-O groups. The stability of the plasma polymers in water on different substrates showed that applied RF power only had a minor effect on film solubility. The nature of the substrate - plasma species interaction is critical in being able to form insoluble structures.

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Copyright 2017 Wiley Blackwell Publishing Access Condition Notes: Post print available after 1 July 2018

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