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Type: Conference paper
Title: Modelling of coplanar waveguide transmission lines in multiple metal layer processes
Author: Heading, E.
Hansen, H.
Parker, M.
Citation: Proceedings of Smart Materials Nano- and Micro-Smart Systems, 2007;. pp.1-7
Publisher: SPIE
Publisher Place: USA
Issue Date: 2007
Series/Report no.: Proceedings of SPIE: the International Society for Optical Engineering ; 6414
ISBN: 9780819465221
Conference Name: Smart structures, devices, and systems III (2006 : Adelaide, Australia)
Statement of
E. Heading, H. J. Hansen and M. E. Parker
Abstract: Accurate characterisation of transmission lines is essential in enabling the design of Monolithic Microwave Integrated Circuits (MMICs) or Radio Frequency Integrated Circuits (RFICs). One RFIC technology currently being pursued is Silicon on Sapphire Complementary Metal Oxide Semiconductor (CMOS) technology. CMOS processes typically involve stacked metal layer structures and the correct method of modelling coplanar waveguides in CMOS is unclear. This paper reports on preliminary studies into electromagnetic design, with an emphasis on correctly predicting losses associated with these structures.
Description: Copyright © 2007 SPIE - The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Provenance: Published online Jan. 11, 2007.
RMID: 0020073019
DOI: 10.1117/12.695676
Appears in Collections:Electrical and Electronic Engineering publications

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