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Type: Journal article
Title: Measurements of TiOx stress induced on InP/InGaAs/InGaAsP quantum well heterostructures
Author: François, A.
Aimez, V.
Beauvais, J.
Barba, D.
Citation: Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces & Films, 2006; 24(3):797-801
Publisher: American Institute of Physics
Issue Date: 2006
ISSN: 1553-1813
Statement of
A. Francois, V. Aimez, J. Beauvais and D. Barba
Abstract: Measurements of stress induced by TiO<sub>x</sub> layers on single quantum well InP based heterostructure are presented. Strain characterization has been performed by photoluminescence (PL) and micro-Raman spectroscopy. We present a comparison of the stress induced by TiO<sub>x</sub> and SiO<sub>2</sub> layers which are commonly used as masking material for the quantum well intermixing process. Micro-Raman spectroscopy and PL revealed that TiO<sub>2</sub> is creating a stress field in the top layers of the heterostructure, with a dependence on temperature and stressor thickness. A hysteresis phenomenon of the Raman shift has also been observed after measurements at low temperature (below 300 K) which shows that the stress created by TiO<sub>x</sub> exceeds the elastic limit of InP. On the other hand, there is no evidence that SiO<sub>2</sub> is inducing stress. Rapid thermal annealing of samples covered with titanium oxide results in improvement of the thermal stability.
Rights: © 2006 American Vacuum Society
RMID: 0020095348
DOI: 10.1116/1.2172925
Appears in Collections:Chemistry and Physics publications

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