Inverse control of a piezoelectric actuator for precise operation of a micro-motion stage
Date
2010
Authors
Minase, J.
Lu, T.
Cazzolato, B.
Grainger, S.
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Conference paper
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Proceedings of the 2010 Australasian Conference on Robotics & Automation (ACRA2010), held in Brisbane Australia, 1-3 December 2010 / G. Wyeth and B. Upcroft (eds.): pp.1-10
Statement of Responsibility
Jayesh Minase, Tien-Fu Lu, Ben Cazzolato and Steven Grainger
Conference Name
ACRA 2010
Abstract
The inverse control of a piezoelectric actuator for precise tracking operation of a three degree of freedom (DOF) micro-motion stage is presented in this paper. This stage, which provides translational motion in X and Y directions and rotation about the Z-axis, is actuated using three stack type piezoelectric actuators. Although capable of resolution in micrometres to sub-nanometres, the actuators exhibit a significant amount of hysteresis and creep, which may lead to substantial errors if the stage was used in a tracking application. Thus, for the stage to provide precise operation, it is necessary to mitigate the effects due to hysteresis and creep. To minimize these effects, an inverse, feed-forward, control strategy is presented in this paper. Experimental results are presented to display the effectiveness of this control strategy in precise operation of the stage over a wide band of amplitudes and frequencies.
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