Inverse control of a piezoelectric actuator for precise operation of a micro-motion stage

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dc.contributor.authorMinase, J.
dc.contributor.authorLu, T.
dc.contributor.authorCazzolato, B.
dc.contributor.authorGrainger, S.
dc.contributor.conferenceACRA 2010
dc.date.issued2010
dc.description.abstractThe inverse control of a piezoelectric actuator for precise tracking operation of a three degree of freedom (DOF) micro-motion stage is presented in this paper. This stage, which provides translational motion in X and Y directions and rotation about the Z-axis, is actuated using three stack type piezoelectric actuators. Although capable of resolution in micrometres to sub-nanometres, the actuators exhibit a significant amount of hysteresis and creep, which may lead to substantial errors if the stage was used in a tracking application. Thus, for the stage to provide precise operation, it is necessary to mitigate the effects due to hysteresis and creep. To minimize these effects, an inverse, feed-forward, control strategy is presented in this paper. Experimental results are presented to display the effectiveness of this control strategy in precise operation of the stage over a wide band of amplitudes and frequencies.
dc.description.statementofresponsibilityJayesh Minase, Tien-Fu Lu, Ben Cazzolato and Steven Grainger
dc.identifier.citationProceedings of the 2010 Australasian Conference on Robotics & Automation (ACRA2010), held in Brisbane Australia, 1-3 December 2010 / G. Wyeth and B. Upcroft (eds.): pp.1-10
dc.identifier.isbn9780980740417
dc.identifier.orcidLu, T. [0000-0001-9757-9028]
dc.identifier.orcidCazzolato, B. [0000-0003-2308-799X]
dc.identifier.orcidGrainger, S. [0000-0003-4664-7320]
dc.identifier.urihttp://hdl.handle.net/2440/63346
dc.language.isoen
dc.publisherARAA
dc.publisher.placewww
dc.rightsCopyright status unknown
dc.source.urihttp://www.araa.asn.au/acra/acra2010/authors.html
dc.titleInverse control of a piezoelectric actuator for precise operation of a micro-motion stage
dc.typeConference paper
pubs.publication-statusPublished

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