Thin film characterization using terahertz differential time-domain spectroscopy and double modulation
Date
2001
Authors
Mickan, S.
Lee, K.S.
Lu, T.M.
Barnat, E.
Munch, J.
Abbott, D.
Zhang, X.
Editors
Bergmann, N.W.
Advisors
Journal Title
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Conference paper
Citation
Electronics and Structures for MEMS II, 17-19 December 2001 / Neil W. Bergmann, Derek Abbott, Alex Hariz, Vijay K. Varadan (eds.): pp. 197-209
Statement of Responsibility
Samuel P. Mickan, Kwang-Su Lee, Toh-Ming Lu, Edward Barnat, Jesper Munch, Derek Abbott, and Xi-Cheng Zhang
Conference Name
Electronics and Structures for MEMS II (2nd : 2001 : Adelaide, Australia)
Abstract
Characterizing the optical and dielectric properties of thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonics systems and micro-opto-electro-mechanical systems (MOEMS). Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz (THz) radiation to detect phase changes of less than 0.6 femtoseconds (fs) and absorption changes corresponding to several molecular monolayers. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. The technique is experimentally verified using 1 µm thick samples of silicon dioxide on silicon.
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Dissertation Note
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© 2003 COPYRIGHT SPIE--The International Society for Optical Engineering