Atomic layer deposition of SiO₂ on porous alumina membranes: Controlling the pore size and transport properties
Date
2008
Authors
Velleman, L.
Triani, G.
Evans, P.
Atanacio, A.
Shapter, J.
Losic, D.
Editors
Voelcker, N.H.
Thissen, H.W.
Thissen, H.W.
Advisors
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Conference paper
Citation
Proceedings of SPIE, 2008 / Voelcker, N.H., Thissen, H.W. (ed./s), vol.7267, pp.1-8
Statement of Responsibility
Leonora Velleman, Gerry Triani, Peter J. Evans, Armand Atanacio, Joe G. Shapter, and Dusan Losic
Conference Name
SPIE: Smart Materials, Nano+Micro-Smart Systems (8 Dec 2008 - 10 Dec 2008 : Melbourne, VIC)
Abstract
Atomic layer depositon (ALD) of SiO2 onto nanoporous alumina (PA) membranes was investigated with the aim of adjusting the pore size and transport properties. PA membranes from commercial sources with a range of pore diameters (20 nm, 10 nm and 20 nm) were used and modifed by atomic layer depositon using tris(rert-butoxy)silanol and water as the precursor couple. By adjusting the number of depositon cycles, the thicknes of the conformal silca coating was controled, reducing the efective pore diameter, and subsequently changing the transport properties of the PA membrane. Silca coated PA membranes with desired pore diameters from <5 nm to 10 nm were fabricated. In aditon to the pore size, the transport properties and selectivity of abricated silca coated PA membranes were controled by chemical functionalisation using a silane with hydrophobic properties. Structural and chemical properties of modifed membranes were studied by dynamic secondary ion mas spectrometry (DSIMS) and scaning electron microscopy (SEM). Spectrophotometric methods were used to evaluate the transport properties and selectivity of silca coated membranes by permeation studies of hydrophobic and hydrophilc organic molecules. The resultant silca/PA membranes with specifc surface chemistry and controled pore size are aplicable for molecular separation, cel culture, bioreactors, biosensing and drug delivery.
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© 2008 SPIE